HEAVY INDUSTRIAL PLASMA SYSTEMS

Thierry offers a wide range of specialized plasma systems that can expedite your plasma process needs. If you have a special request for a plasma system, Thierry has a solution for you. We can custom build any system to accommodate your specifications.

 

There are two main aspects to keep in mind when deciding which system is best for you. The amount of materials to be treated and the size of the parts to be treated. The production plasma systems we supply are made for hard, enduring work.


Special Cleaner Tetra-15-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 66.9 in, D 31.4 in
Chamber:
W 14.1 in, H 5.9 in, D 10.2 in
Chamber volume:
approx. 30 liters (4 gallons)
Gas Suppy:
2 gas channels via MFCs

Generator:
2 pcs. with 40kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-30-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 31.5 in, H 23.6 in, D 19.7 in
Chamber:
W 9.4 in, H 5.9 in, D 9.4 in
Chamber volume:
approx. 30 liters (8 gallons)
Gas Supply:
1 gas channel via MFC
Automation:
The system can be integrated into a production line.
Generator:
1 pc. with 40kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-100-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 78.7 in, H 86.6 in, D 78.7 in
Chamber:
W 27.5 in, H 7.9 in, D 27.5 in
Chamber volume:
approx. 100 liters (26 gallons)
Gas Supply:
3 gas channels via MFCs
Automation:
The system has a fully automatic drawer door.
Generator:
1 pc. with 40kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-120-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 84.6 in, D 39.4 in
Chamber:
W 47.2 in, H 5.9 in, D 66.9 in
Chamber volume:
approx. 120 liters (32 gallons)
Gas Supply:
4 gas channels via MFCs
Automation:
The system has a fully automatic door.
Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-130-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 70.8 in, H 82.7 in, D 51.2 in
Chamber:
W 15.7 in, H 15.7 in, D 31.9 in
Chamber volume:
approx. 130 liters (34.5 gallons)
Gas Supply:
3 gas channels via MFCs, monomer dispensor for plasma polymerization 
Features:
UHV area with a turbopump
Generator:
1 pc. with 13.56 MHz
(optional: 40 kHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-140-LF | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 82.7 in, D 25.6 in
Chamber:
W 47.2 in, H 27.5 in, D 59 in
Chamber volume:
approx. 140 liters (37 gallons)
Gas Supply:
3 gas channels via MFCs 
drawer door.
Generator:
1 pc. with 40kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-140-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 39.4 in, H 70.8 in, D 39.4 in
Chamber:
W 39.4 in, H 3.9 in, D 39.4 in
Chamber volume:
approx. 140 liters (37 gallons)
Gas Supply:
2 gas channels via MFCs, liquid monomer dispensor for plasma polymerization
Generator:
1 pc. with 40kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-150-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 39.4 in, H 82.7 in, D 39.4 in
Chamber:
W 15.7 in, H 23.6 in, D 24.6 in
Chamber volume:
approx. 150 liters (40 gallons)
Gas Supply:
2 gas channels via MFCs
Automation:
Roll to roll for rolls that are 15.7 in wide and 11.81 in diameter

Generator:
1 pc. with 40kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-240-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 66.9 in, D 126 in
Chamber:
W 12 in, H 11.8 in, D 102.4 in
Chamber volume:
approx. 240 liters (63 gallons)
Gas Supply:
3 gas channels via MFCs
Generator:
1 pc. with 40kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-260-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 98.4 in, H 86.6 in, D 39.4 in
Chamber:
W 25.6 in, H 19.7 in, D 31.5 in
Chamber volume:
approx. 260 liters (68.4 gallons)
Gas Supply:
2 gas channels via MFCs
Generator:
10 pcs. with 40kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-375-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 82.7 in, D 31.5 in
Chamber:
W 23.6 in, H 14.2 in, D 74.8 in
Chamber volume:
approx. 375 liters (99 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Special Cleaner Tetra-400-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 82.7 in, D 25.6 in
Chamber:
W 29.5 in, H 31.5 in, D 29.5 in
Chamber volume:
approx. 400 liters (106 gallons)
Gas Supply:
3 gas channels via MFCs
Automation:
The system has a fully automatic sliding door.

Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-420-LF-PC-PCB | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 63 in, H 82.7 in, D 47.2 in
Chamber:
W 29.5 in, H 31.5 in, D 29.5 in
Chamber volume:
approx. 420 liters (111 gallons)
Gas Supply:
4 gas channels via MFCs

Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-500-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 82.6 in, D 31.5 in
Chamber:
W 59 in, H 66.9 in, D 7.9 in
Chamber volume:
approx. 500 liters (132 gallons)
Gas Supply:
3 gas channels via MFCs

Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:

2 roll-to-roll systems
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-575-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 45.3 in, H 74.8 in, D 63 in
Chamber:
W 23.6 in, H 47.2 in, D 31.5 in
Chamber volume:
approx. 575 liters (152 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
1 pc. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:

Up to 22 trays
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-600-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 70.9 in, H 70.9 in, D 31.5 in
Chamber:
W 22.8in, H 28.7 in, D 39.4 in
Chamber volume:
approx. 600 liters (159 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
1 pc. with 40 kHz, automatic matching
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-600-LF-PC-D Version 1 | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 86.6 in, D 31.5 in
Chamber:
Ø 43.3 in, D 27.6 in
Chamber volume:
approx. 600 liters (159 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
2 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:

Rotary drum (with four baskets, 30 liters each)
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-600-LF-PC-D Version 2 | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 39.4 in, H 86.6 in, D 70.9 in
Chamber:
Ø 39.4 in, D 29.4 in
Chamber volume:
approx. 600 liters (159 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
4 pcs. with 40 kHz each, automatic matching
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-2000-RF-PC | Thierry Corp. Plasma Systems

Technical Data:

Chamber:
W 39.4 in, H 78.7, D 39.4in
Chamber volume:
approx. 2000 liters (529 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
1 pcs. at 13.56 MHz
Trays:

Up to 10 trays
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-2400-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 86.6 in, D 31.5 in
Chamber:
Ø 43.3 in, D 98.4 in
Chamber volume:
approx. 2400 liters (635 gallons)
Gas Supply:
3 gas channels via MFCs

Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:

Rotary drum (with 16 baskets, 30 liters each)
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-2800-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control cabinet:
W 23.6 in, H 66.9 in, D 31.5 in
Chamber:
Ø 47.2 in, D 98.4 in
Chamber volume:
approx. 2800 liters (740 gallons)
Gas Supply:
3 gas channels via MFCs

Generator:
1 pc. at 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-4400-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control Cabinet:
W 70.8 in, H 39.4 in, D 31.5 in
Chamber:
W 53.1 in, H 102.4 in, D 49.2 in
Chamber volume:
approx. 4400 liters (1164 gallons)
Gas Supply:
3 gas channels via MFCs

Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus
Features:
oxygen generator
roots pump plasma exhaust cleaner

Special Cleaner Tetra-5600-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control Cabinet:
W 70.8 in, H 86.6 in, D 70.8 in
Chamber:
W 88.6 in, H 96.5 in, D 39.4 in
Chamber volume:
approx. 5600 liters (1481 gallons)
Gas Supply:
3 gas channels via MFCs

Generator:
6 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:
Trolleys are used to load the chamber
(optional: special drum)
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-7000-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control Cabinet:
W 94.5 in, H 90.5 in, D 39.4 in
Chamber:
W 94.5 in, H 82.7 in, D 55.1 in
Chamber volume:
approx. 7000 liters (1852 gallons)
Gas Supply:
3 gas channels via MFCs

Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbusr

Special Cleaner Tetra-7500-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control Cabinet:
W 118.1 in, H 78.7 in, D 39.4 in
Chamber:
W 59 in, H 78.7 in, D 98.4 in
Chamber volume:
approx. 4500 liters (1984 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
6 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-8000-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control Cabinet:
W 78.7 in, H 70.8 in, D 39.4 in
Chamber:
W 66.9 in, H 66.9 in, D 110.2 in
Chamber volume:
approx. 8000 liters (2116 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
4 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Control:
PC-controlled (Windows) with industrial fieldbus

Special Cleaner Tetra-12600-LF-PC | Thierry Corp. Plasma Systems

Technical Data:

Control Cabinet:
W 47.2 in, H 86.6 in, D 31.5 in
Chamber:
W 94.5 in, H 82.7 in, D 98.4 in
Chamber volume:
approx. 12600 liters (3333 gallons)
Gas Supply:
2 gas channels via MFCs

Generator:
6 pcs. with 40 kHz each
(optional: 13.56 MHz or 2.45 GHz)
Trays:
Trolleys are used to load the chamber
Control:
PC controlled (Windows) with industrial fieldbus

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