PECVD | Plasma Coating

Coating with plasma is a versatile method to apply ultra-thin polymeric layers on a wide range of materials.

Plasma Coating - How it Works

Plasma coating can be performed either as PVD (physical vapor deposition) or PECVD (plasma-enhanced chemical vapor deposition). Plastics, metals, ceramics, glass, and a number of other materials can be finished by plasma coating.

PVD Coating (hydrophobic and hydrophilic)

In physical vapor deposition, the material for coating is evaporated with the aid of plasma. It condenses on the surface, forming a thin, strong layer that can be either hydrophobic or hydrophilic.

PECVD

Plasma-enhanced chemical vapor deposition (PECVD) is an improved form of chemical vapor deposition (CVD). In CVD, the object to be coated is heated to high temperatures before the monomer is introduced into the plasma chamber. In PECVD, on the other hand, plasma is used to accelerate the coating process. In PECVD the desired results are easily obtainable and thermal stress upon the workpiece is lower.

Special Types of Layers

PTFE coatings: Almost any type of material can be sealed with a layer of PTFE-like material by adding either carbon tetrafluoride (CF4) or fluorine (F2) to the plasma coating process.
Functional layers: Layers with chemical functionality can be generated by plasma coating. One example is the functionalization of glass with amino groups which will chemically bind proteins.
DLC (diamond-like carbon) films: By plasma coating, highly cross-linked hydrocarbon layers can be deposited on workpieces. They have diamond-like properties, being extremely hard, smooth, chemically resistant, and biocompatible.

Coating Plasma - Users and Uses

Textile manufacturing: Coating by plasma can turn cotton hydrophobic and fibers dirt-repellent. Plasma coating is an essential first step in preparing yarns for the manufacturing of smart textiles.
Manufacturing of biochips by plasma coating: Deposition of functional layers on glass for the chemical binding of bio-molecules.
Friction bearings: Plasma coating of moving parts with diamond-like carbon films for lubricant-free systems.
Fuel tank manufacturing: Protective layers of PTFE-like materials generated by plasma coating render plastic impenetrable and corrosion-resistant.

Our Plasma Services:

free process development
test or rental of our Plasma Systems
sale and support
contract services

For any questions please contact us.

Thierry Corporation (Michigan / USA)
Phone:+1 (248) 549 8565
plasma(at)thierry-corp.com

Hydrophobic Coating on textile

: Untreated cotton (colored water)

: Treated cotton (colored water) hydrophobic

Hydrophilic Coating on metal

: Metal surface untreated

: Metal surface treated

Plasma Coating

Plasma coating refers to a coating that has been deposited on a substrate surface using a plasma system. This plasma technology is used in a number of applications where a very thin and uniform film thickness is required. Common coating materials include chemicals such as silicon dioxide or silicon nitride as well as a variety of organic polymer forming species. Deposition of a polymer surface coating using plasma is referred to as plasma polymerization.

Plasma Coating Applications

Plasma coating applications include coating objects with antiglare, dielectric, water repellent (hydrophobic), heat and chemical resistance coatings. A coating may be deposited on a variety of materials including metals, polymers and ceramics.

What PECVD Technology Encompasses

PECVD, or Plasma-Enhanced Chemical Vapor Deposition is a plasma treatment process that involves placing the parts to be coated into a vacuum chamber. The chamber is sealed and the pressure is reduced to approximately 0.1-0.5 mbar. Next, a process gas and chemical are allowed to flow into the chamber at a very slow rate. A voltage is then applied to form the plasma. The process is continued until the desired film thickness is achieved. This plasma process has a huge advantage over regular Chemical Vapor Deposition (CVD) in that PECVD can be conducted at a far lower temperature.

PECVD Technology Applications

PECVD technology applications are found in many industries. For example, in optics it is used to apply antireflective, scratch resistant and bypass filter coatings to lenses and shields. In micro-electronics plasma systems are used to prepare photosensitive and electronically active layers, thin film transistors, passivation layers, dielectric layers, isolating layers and diffusion barrier layers. This plasma technology is also used to prepare light detectors, solar cells, sensors and etch stop layers. It is further used for encapsulation. In packaging, PECVD is used to prepare chemical and humidity barriers.