---
title: Todos los sistemas de plasma | Thierry Corporation
description: Esta es una lista de todos los sistemas de plasma disponibles de Thierry Corporation
image: https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_PlasmaBeam-Duo-PC.png
---

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##### [Productos](https://www.thierry-corp.com/plasma-technology/products?hsLang=es-mx)

# Sistemas de tratamiento por plasma

## Filtre según sus requisitos:

 Tipo de sistema 

All Low Pressure Atmospheric

 Nombre 

All Femto Pico Nano Tetra Special Tetra Yocto Zepto Atto APC 500 Plasma Beam Plasma Beam PC Plasma Beam Duo Plasma Beam Quatro Plasma Beam RT

 Volumen 

All .3 2 2.6 5 10.5 15 24 30 45 50 100 120 140 150 240 260 320 375 400 420 500 575 600 2000 2800 2400 3600 4400 5600 7000 7500 8000 12600

 Control 

All Semi-Automatic Touch Screen PC Rotary Control External PC

## No Items Found!

![Femto Version 1 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Femto-version-1.png)

#### Femto Version 1

**Control Cabinet:**  
W 310 mm H 330 mm D 420 mm

**Chamber:**  
Ø 3.9 in, L 10.9 in

**Chamber Volume:**  
2

**Gas Supply:**  
1 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Femto_EN.pdf?hsLang=es-mx)

![Femto Version 2 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Femto-version-2.png)

#### Femto Version 2

**Control Cabinet:**  
W 310 mm H 330 mm D 420 mm

**Chamber:**  
Ø 3.9 in, L 10.9 in

**Chamber Volume:**  
2

**Gas Supply:**  
1 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Femto_EN.pdf?hsLang=es-mx)

[Learn more](https://www.thierry-corp.com/plasma-technology/products/femto-version-2?hsLang=es-mx)

![Femto Version 3 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Femto-version-3.png)

#### Femto Version 3

**Control Cabinet:**  
W 310 mm H 330 mm D 420 mm

**Chamber:**  
Ø 3.9 in, L 10.9 in

**Chamber Volume:**  
2

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Femto_EN.pdf?hsLang=es-mx)

![Femto Version 4 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Femto-version-4.png)

#### Femto Version 4

**Control Cabinet:**  
W 310 mm H 560 mm D 420 mm

**Chamber:**  
Ø 3.9 in, L 10.9 in

**Chamber Volume:**  
2

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Femto_EN.pdf?hsLang=es-mx)

![Femto Version 5 for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Femto_Plasmasystem.png)

#### Femto Version 5

**Control Cabinet:**  
W 310 mm H 330 mm D 420 mm

**Chamber:**  
Ø 3.9 in, L 10.9 in

**Chamber Volume:**  
2

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Femto_EN.pdf?hsLang=es-mx)

![Femto Version 6 for Reactive Ion Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Femto-version-6.png)

#### Femto Version 6

**Control Cabinet:**  
W 560 mm H 560 mm D 420 mm

**Chamber:**  
Ø 3.9 in, L 10.9 in

**Chamber Volume:**  
2

**Gas Supply:**  
1 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Femto_EN.pdf?hsLang=es-mx)

![Femto Version 7 for Plasma Coating](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Femto-version-7.png)

#### Femto Version 7

**Control Cabinet:**  
W 560 mm H 560 mm D 420 mm

**Chamber:**  
Ø 3.9 in, L 10.9 in

**Chamber Volume:**  
2

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Femto_EN.pdf?hsLang=es-mx)

![Femto Version 8 for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Femto-version-8.png)

#### Femto Version 8

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
Ø 3.9 in, L 10.9 in

**Chamber Volume:**  
2

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Femto_EN.pdf?hsLang=es-mx)

![Pico Version 1 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Pico-version-1.png)

#### Pico Version 1

**Control Cabinet:**  
W 310 mm H 330 mm D 420 mm

**Chamber:**  
Ø 5.9 in, L 12.6 in

**Chamber Volume:**  
5

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Pico_EN.pdf?hsLang=es-mx)

![Pico Version 2 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Pico-version-2.png)

#### Pico Version 2

**Control Cabinet:**  
W 560 mm H 560 mm D 420 mm

**Chamber:**  
Ø 5.9 in, L 12.6 in

**Chamber Volume:**  
5

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Pico_EN.pdf?hsLang=es-mx)

![Pico Version 3 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Pico-version-3.png)

#### Pico Version 3

**Control Cabinet:**  
W 560 mm H 560 mm D 420 mm

**Chamber:**  
Ø 5.9 in, L 12.6 in

**Chamber Volume:**  
5

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Pico_EN.pdf?hsLang=es-mx)

![Pico Version 4 for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Pico-version-4.png)

#### Pico Version 4

**Control Cabinet:**  
W 310 mm H 330 mm D 420 mm

**Chamber:**  
Ø 5.9 in, L 12.6 in

**Chamber Volume:**  
5

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Pico_EN.pdf?hsLang=es-mx)

![Pico Version 5 for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Pico-version-5.png)

#### Pico Version 5

**Control Cabinet:**  
W 560 mm H 600 mm D 420 mm

**Chamber:**  
Ø 5.9 in, L 12.6 in

**Chamber Volume:**  
5

**Gas Supply:**  
3 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Pico_EN.pdf?hsLang=es-mx)

![Pico Version 5 for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems__Pico-version-6.png)

#### Pico Version 6

**Control Cabinet:**  
W 560 mm H 600 mm D 420 mm

**Chamber:**  
Ø 5.9 in, L 12.6 in

**Chamber Volume:**  
5

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Pico_EN.pdf?hsLang=es-mx)

![Pico Version 7 for Plasma Coating](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Pico-version-7.png)

#### Pico Version 7

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
Ø 5.9 in, L 12.6 in

**Chamber Volume:**  
5

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Pico_EN.pdf?hsLang=es-mx)

![Nano Version 1 for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Nano-version-1.png)

#### Nano Version 1

**Control Cabinet:**  
W 560 mm H 600 mm D 600 mm

**Chamber:**  
Ø 10.5 in, L 16.5 in

**Chamber Volume:**  
24

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Nano_EN.pdf?hsLang=es-mx)

![Nano Version 2 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Namo-version-2.png)

#### Nano Version 2

**Control Cabinet:**  
W 560 mm H 600 mm D 600 mm

**Chamber:**  
Ø 10.5 in, L 16.5 in

**Chamber Volume:**  
24

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Nano_EN.pdf?hsLang=es-mx)

![Nano Version 3 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Namo-version-3.png)

#### Nano Version 3

**Control Cabinet:**  
W 560 mm H 600 mm D 600 mm

**Chamber:**  
Ø 10.5 in, L 16.5 in

**Chamber Volume:**  
24

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Nano_EN.pdf?hsLang=es-mx)

![Nano Version 4 for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Nano_Plasmasystem.png)

#### Nano Version 4

**Control Cabinet:**  
W 560 mm H 600 mm D 600 mm

**Chamber:**  
Ø 10.5 in, L 16.5 in

**Chamber Volume:**  
24

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Nano_EN.pdf?hsLang=es-mx)

![Nano Version 5 for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Namo-version-5.png)

#### Nano Version 5

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
Ø 10.5 in, L 16.5 in

**Chamber Volume:**  
24

**Gas Supply:**  
2 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Nano_EN.pdf?hsLang=es-mx)

![Nano Version 6 for Plasma Coating](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Namo-version-6.png)

#### Nano Version 6

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
Ø 10.5 in, L 16.5 in

**Chamber Volume:**  
24

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Nano_EN.pdf?hsLang=es-mx)

![Tetra 30 PCCE for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Tetra-30-pcce.png)

#### Tetra 30 PCCE

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
W 12" x H 11.8" x D 14.6"

**Chamber Volume:**  
30

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_T30_EN.pdf?hsLang=es-mx)

![Tetra 30 PC for Plasma Coating](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Tetra-30_Plasmasystem.png)

#### Tetra 30 PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
W 12" x H 11.8" x D 14.6"

**Chamber Volume:**  
30

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_T30_EN.pdf?hsLang=es-mx)

![Tetra 50 PCCE for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Background.png)

#### Tetra 50 PCCE

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
W 12" x H 11.8" x D 24.6"

**Chamber Volume:**  
50

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Touch Screen

See the datasheet

![Tetra 50 LF PC](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/tetra-50-lf-pc.png)

#### Tetra 50 LF PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
W 12" x H 11.8" x D 24.6"

**Chamber Volume:**  
50

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

See the datasheet

![Tetra 100 PCCE for Plasma Activation](https://www.thierry-corp.com/hubfs/collateral/pillar-images/Tetra-100-pcce.png)

#### Tetra 100 PCCE

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
W 15.8" x H 15.8" x D 24.6"

**Chamber Volume:**  
100

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_T100_EN.pdf?hsLang=es-mx)

![Tetra 100 PC for Plasma Coating](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Tetra-100-PC.png)

#### Tetra 100 PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
W 15.8" x H 15.8" x D 24.6"

**Chamber Volume:**  
100

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_T100_EN.pdf?hsLang=es-mx)

![Tetra 150 PCCE for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Tetra-150-pcce.png)

#### Tetra 150 PCCE

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**  
W 15.8" x H 23.6" x D 24.6"

**Chamber Volume:**  
150

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_T150_EN.pdf?hsLang=es-mx)

![Tetra 150 PC for Plasma Coating](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Tetra-150-pc.png)

#### Tetra 150 PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**  
W 15.8" x H 23.6" x D 24.6"

**Chamber Volume:**  
150

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_T150_EN.pdf?hsLang=es-mx)

![Special Tetra 15-LF-PC for Plasma Asher](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-15-LF-PC.png)

#### Special Tetra 15-LF-PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
15

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 30-LF-PC for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-30-LF-PC.png)

#### Special Tetra 30-LF-PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
W 12" x H 11.8" x D 14.6"

**Chamber Volume:**  
30

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 100-LF-PC for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Tetra-100_Plasmasystem.png)

#### Special Tetra 100-LF-PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**  
W 15.8" x H 15.8" x D 24.6"

**Chamber Volume:**  
100

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 120-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/tetra-120-rotary_Plasmasystem.png)

#### Special Tetra 120-LF-PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
120

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

[Learn more](https://www.thierry-corp.com/plasma-technology/products/tetra-120-lf-pc?hsLang=es-mx)

![Special Tetra 130-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-130-LF-PC.png)

#### Special Tetra 130-LF-PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**

**Chamber Volume:**

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 140-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-140-LF-PC.png)

#### Special Tetra 140-LF-PC

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
140

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 140-LF-PC-2 for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-140_LF-PC-2.png)

#### Special Tetra 140-LF-PC-2

**Control Cabinet:**  
W 600 mm H 1700 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
140

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 150-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Tetra-150_Plasmasystem.png)

#### Special Tetra 150-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**  
W 15.8" x H 23.6" x D 24.6"

**Chamber Volume:**  
150

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 240-LF-PC for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-240-LF-PC.png)

#### Special Tetra 240-LF-PC

**Control Cabinet:**  
W 870 mm H 1860 mm D 1400 mm

**Chamber:**

**Chamber Volume:**  
240

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 260-LF-PC for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra--260-LF-PC.png)

#### Special Tetra 260-LF-PC

**Control Cabinet:**  
W 870 mm H 1860 mm D 1400 mm

**Chamber:**

**Chamber Volume:**  
260

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 375-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra--375-LF-PC.png)

#### Special Tetra 375-LF-PC

**Control Cabinet:**  
W 870 mm H 1860 mm D 1400 mm

**Chamber:**

**Chamber Volume:**  
375

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 400-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-400-LF-PC.png)

#### Special Tetra 400-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
400

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 420-LF-PC-PCB for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-420-LF-PC-PCB.png)

#### Special Tetra 420-LF-PC-PCB

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
420

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 500-LF-PC for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra--500-LF-PC.png)

#### Special Tetra 500-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
500

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 575-LF-PC for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-575-LF-PC.png)

#### Special Tetra 575-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
575

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 600-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-600-LF-PC-D-V1.png)

#### Special Tetra 600-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
600

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 600-LF-PC-D V1 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-600-LF-PC-D-V1.png)

#### Special Tetra 600-LF-PC-D V1

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
600

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 600-LF-PC-D V2 for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-600-LF-PC-D-V2.png)

#### Special Tetra 600-LF-PC-D V2

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
600

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 2000-RF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-2000-RF-PC.png)

#### Special Tetra 2000-RF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
2000

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 2400-LF-PC for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-2400-LF-PC.png)

#### Special Tetra 2400-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
2400

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 2800-LF-PC for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/tetra-2800_Plasmasystem.png)

#### Special Tetra 2800-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
2800

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

[Learn more](https://www.thierry-corp.com/plasma-technology/products/tetra-2800-lf-pc?hsLang=es-mx)

![Special Tetra 4400-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-4400-LF-PC.png)

#### Special Tetra 4400-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
4400

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 5600-LF-PC for Plasma Coating](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-5600-LF-PC.png)

#### Special Tetra 5600-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
5600

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 7000-LF-PC for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-7000-LF-PC.png)

#### Special Tetra 7000-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
7000

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 7500-LF-PC for Plasma Etching](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-7300-LF-PC.png)

#### Special Tetra 7500-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
7500

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 8000-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-8000-LF-PC.png)

#### Special Tetra 8000-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
8000

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Special Tetra 12600-LF-PC for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Special-Tetra-12600-LF-PC.png)

#### Special Tetra 12600-LF-PC

**Control Cabinet:**  
W 600 mm H 2100 mm D 800 mm

**Chamber:**

**Chamber Volume:**  
12600

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz or 2.45 GHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Yocto Version 1 for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Yocto_Plasmasystem.png)

#### Yocto Version 1

**Control Cabinet:**  
W 150 mm H 100 mm D 450 mm

**Chamber:**  
Ø 1.97 in, L 5.9 in

**Chamber Volume:**  
.3

**Gas Supply:**  
1 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_Yocto_EN.pdf?hsLang=es-mx)

![Zepto Version 1 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Zepto-Version-1.png)

#### Zepto Version 1

**Control Cabinet:**  
W 425 mm H 185 mm D 450 mm

**Chamber:**  
Ø 4.1 in, L 11.8 in

**Chamber Volume:**  
2.6

**Gas Supply:**  
1 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-v2-202207b_Zepto_EN.pdf?hsLang=es-mx)

![Zepto Version 2 for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Zepto-Version-2.png)

#### Zepto Version 2

**Control Cabinet:**  
W 425 mm H 185 mm D 450 mm

**Chamber:**  
Ø 4.1 in, L 11.8 in

**Chamber Volume:**  
2.6

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz)

**Control:**  
Rotary Control

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-v2-202207b_Zepto_EN.pdf?hsLang=es-mx)

![Zepto Version 3 for PDMS Plasma Treatment](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Zepto_Plasmasystem.png)

#### Zepto Version 3

**Control Cabinet:**  
W 425 mm H 185 mm D 450 mm

**Chamber:**  
Ø 4.1 in, L 11.8 in

**Chamber Volume:**  
2.6

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-v2-202207b_Zepto_EN.pdf?hsLang=es-mx)

![Zepto Version 4 for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/zepto-version-4.png)

#### Zepto Version 4

**Control Cabinet:**  
W 425 mm H 185 mm D 450 mm

**Chamber:**  
Ø 4.1 in, L 11.8 in

**Chamber Volume:**  
2.6

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz)

**Control:**  
External PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-v2-202207b_Zepto_EN.pdf?hsLang=es-mx)

![Atto Version 1 for Plasma Cleaning](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Attto-Version-1.png)

#### Atto Version 1

**Control Cabinet:**  
W 425 mm H 275 mm D 450 mm

**Chamber:**  
Ø 8.3 in, L 11.8 in

**Chamber Volume:**  
10.5

**Gas Supply:**  
1 gas channel via needle valve

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz)

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-v2-202207_Atto_EN.pdf?hsLang=es-mx)

![Atto Version 2 for Plasma Activation](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_Attto-Version-2.png)

#### Atto Version 2

**Control Cabinet:**  
W 425 mm H 275 mm D 450 mm

**Chamber:**  
Ø 8.3 in, L 11.8 in

**Chamber Volume:**  
10.5

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz)

**Control:**  
Rotary Control

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-v2-202207_Atto_EN.pdf?hsLang=es-mx)

![Atto Version 3 for PDMS Plasma Treatment](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Atto_Plasmasystem.png)

#### Atto Version 3

**Control Cabinet:**  
W 425 mm H 275 mm D 450 mm

**Chamber:**  
Ø 8.3 in, L 11.8 in

**Chamber Volume:**  
10.5

**Gas Supply:**  
Mass flow controllers

**Generator:**  
1 pc. with 40 kHz  
(optional: 13.56 MHz)

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-v2-202207_Atto_EN.pdf?hsLang=es-mx)

![APC 500 Corona Plasma Source](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/atmospheric/Plasma_APC500.png)

#### APC 500 Corona Plasma Source

**Control Cabinet:**  
W 562 mm H 211 mm D 450 mm

**Chamber:**

**Chamber Volume:**

**Gas Supply:**

**Generator:**  
1 pc. with 40 kHz

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Atmos___DB000013DEEN-202110_APC500_EN.pdf?hsLang=es-mx)

![Plasma Beam for Atmospheric Plasma Source](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_PlasmaBeam.png)

#### Plasma Beam

**Control Cabinet:**  
W 562 mm H 211 mm D 450 mm

**Chamber:**

**Chamber Volume:**

**Gas Supply:**

**Generator:**  
1 pc. with 40 kHz

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Atmos___DB000013DEEN-202110_PB_Std_EN.pdf?hsLang=es-mx)

[Learn more](https://www.thierry-corp.com/plasma-technology/products/plasma-beam?hsLang=es-mx)

![Plasma Beam PC for Atmospheric Plasma Source](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_PlasmaBeam-PC.png)

#### Plasma Beam PC

**Control Cabinet:**  
W 562 mm H 211 mm D 450 mm

**Chamber:**

**Chamber Volume:**

**Gas Supply:**

**Generator:**  
1 pc. with 40 kHz

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Atmos___DB000013DEEN-202110_PB_PC_EN.pdf?hsLang=es-mx)

![Plasma Beam Duo for Atmospheric Plasma Source](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_PlasmaBeam-Duo.png)

#### Plasma Beam Duo

**Control Cabinet:**  
W 562 mm H 211 mm D 450 mm

**Chamber:**

**Chamber Volume:**

**Gas Supply:**

**Generator:**  
1 pc. with 40 kHz

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Atmos___DB000013DEEN-202110_PB_Duo_EN.pdf?hsLang=es-mx)

![Plasma Beam Duo PC for Atmospheric Plasma Source](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/thierry-plasma-systems_PlasmaBeam-Duo-PC.png)

#### Plasma Beam Duo

**Control Cabinet:**  
W 562 mm H 360 mm D 650 mm

**Chamber:**

**Chamber Volume:**

**Gas Supply:**

**Generator:**  
1 pc. with 40 kHz

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Atmos___DB000013DEEN-202110_PB_Duo_EN.pdf?hsLang=es-mx)

![Tetra 45 PC for Plasma Treatment System](https://www.thierry-corp.com/hubfs/Thierry_Aug20/Plasma_systems/products/Tetra-45_Plasmasystem.png)

#### Tetra 45 PC

**Control Cabinet:**  
W 875mm D 1000 mm H 1700 mm

**Chamber:**  
W 572 mm D 650 mm H 125 mm

**Chamber Volume:**  
45

**Gas Supply:**  
2 - 6 MFCs

**Generator:**  
80 Khz – 1000 watts  
(13.56 Mhz)

**Control:**  
PC

See the datasheet

[Learn more](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_T45_EN.pdf?hsLang=es-mx)

![Tetra 320r for Low Pressure Plasma Treament](https://www.thierry-corp.com/hubfs/tetra-320r_Plasmasystem.png)

#### Tetra 320r

**Control Cabinet:**  
W 870 mm, H (with feet) 1860 mm, D 1400 mm

**Chamber:**  
∅ 640 mm, D 1000 mm

**Chamber Volume:**  
320

**Gas Supply:**  
2 - 6 MFCs

**Generator:**  
80 kHz - 300 Watt  
(13.56 MHz)

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Niederdruck___DB000012DEEN-202110_T320R_EN.pdf?hsLang=es-mx)

![Tetra 3600](https://www.thierry-corp.com/hubfs/Tetra_3600.jpg)

#### Tetra 3600

**Control Cabinet:**

**Chamber:**

**Chamber Volume:**  
3600

**Gas Supply:**

**Generator:**

**Control:**  
PC

[See the datasheet](https://www.thierry-corp.com/hubfs/brochures/Special_Systems.pdf?hsLang=es-mx)

![Plasma Beam Quatro for Atmospheric  Plasma Quatro](https://www.thierry-corp.com/hubfs/images/product/Plasmabeam-quattro.png)

#### Plasma Beam Quatro

**Control Cabinet:**  
W 560mm, H 355mm, D 540mm

**Chamber:**

**Chamber Volume:**

**Gas Supply:**

**Generator:**  
4 pc. with 20 kHz

**Control:**  
Semi-Automatic

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Atmos___DB000013DEEN-202110_PB_Quat_EN.pdf?hsLang=es-mx)

![Plasma Beam RT for Atmospheric Plasma RT](https://www.thierry-corp.com/hubfs/images/product/PlasmaBeam_RT_stage.jpg)

#### Plasma Beam RT

**Control Cabinet:**  
W 189 mm, H 600mm, D 192mm

**Chamber:**

**Chamber Volume:**

**Gas Supply:**

**Generator:**  
2 pc. with 20 kHz

**Control:**  
Touch Screen

[See the datasheet](https://www.thierry-corp.com/hubfs/collateral/brochures/Atmos___DB000013DEEN-202110_PB_RT_EN.pdf?hsLang=es-mx)

#### Consulta

##### **Solicite una llamada de selección de sistemas de plasma**

[Solicitar](https://www.thierry-corp.com/plasma/services/plasma-system-selection?hsLang=es-mx)

**Contacto**  
Thierry Corporation  
4319 Normandy Court  
Royal Oak, MI 48073, EUA

**Teléfono:** [+1 (248) 549 8600](tel:+1485498600)  
**Fax:** [+1 (248) 549 3533](fax:+12485493533)  
[info@thierry-corp.com](mailto:info@thierry-corp.com)

© 2026 Todos los derechos reservados - Thierry Corp. | [Política de Privacidad](https://www.thierry-corp.com/privacy-policy?hsLang=es-mx) | [Términos de uso](https://www.thierry-corp.com/terms-conditions?hsLang=es-mx)

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