THIERRY NANO 24 LITERS

Thierry provides several different Nano models for many different types of applications. These production, industrial capable plasma units are the largest table top systems offered but are fully customizable with all the options possible.

Plasma System Nano

The Nano unit has a chamber size of approximately 18 liters, but an extended chamber is an option for up to 36 liters.  Nano systems are high quality units capable of being utilized in manufacturing applications.


Basic Configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 18 - 36 liters
- Power supply: 230 V AC for table top system or
   400 V AC / 3 phases for stand alone systems

Gas supply

- Needle valves
- Mass-Flow-Controller (MFCs)

Vacuum chambers

- Stainless steel
    round with cover

    (approx. Ø 267 mm, L 420 mm or L 600 mm) or
    rectangular with hinged door
    (approx. W 240 mm x H 240 mm x D 420 mm or 600 mm)

- Aluminum
    round with cover or with hinged door
    (approx. inner Ø 240 mm, opening Ø 230 mm, or L 400 mm or L 600 mm)

- Quartz glass (UHP)
    round with cover or with hinged door

    (approx. inner Ø 240 mm, opening Ø 230 mm, or L 400 mm or L 600 mm)

- Borosilicate glass (UHP)
    round with cover or with hinged door
    (approx. inner Ø 240 mm, opening Ø 230 mm, or L 400 mm or L 600 mm)

Loading

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE-electrode

Control

- Semi automatic

- PCCE-control (Microsoft Windows CE)

- PC-control (Microsoft Windows XPE)

Timer

- Digital

Generators

- Frequencies:  40 kHz: Power 0 - 300 W; 0 - 1000 W

                      13.56 MHz: Power 0 - 100 W; 0 - 300 W

                        2.45 GHz: Power 0 - 600 W

All generators are continuously adjustable from 0 - 100 %

Vacuum pumps

- in different sizes from different from different manufacturers

(if necessary with active carbon filter)

Options

- Spare parts sets

 

- Pressure gauge

 

- Corrosive gas version

 

- Gas bottles

 

- Pressure reducer

 

- Heating plate

 

- Temperature indicator

 

- Heatable chamber

 

- Faraday box

 

- Polymerization equipment

 

- Test ink set, Oxygen generator

 

- Slow ventilation of vacuum chamber

 

- Slow pump down of the vacuum chamber

 

- TEM sample holder flange

 

- Maintenance / service

 

- Documentation in national language

 

- Installation on site including training

Nano Version 1
Nano Version 1 | Thierry Corp. Plasma Systems
Nano Version 2
Nano Version 2 | Thierry Corp. Plasma Systems
Nano Version 3
Nano Version 3 | Thierry Corp. Plasma Systems
Nano Version 4
Nano Version 4 | Thierry Corp. Plasma Systems
Nano Version 5
Nano Version 5 | Thierry Corp. Plasma Systems
Nano Version 6
Nano Version 6 | Thierry Corp. Plasma Systems

Thierry Corporation

4319 Normandy Court
Royal Oak, MI 48073, USA

Phone: +1 (248) 549 8565
Fax: +1 (248) 549 3533
plasma@thierry-corp.com
 

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