THIERRY PICO 5 LITERS

Thierry provides several different Pico models for many different types of applications. These production, industrial capable plasma units are a moderate sized chamber but are fully customizable with all the options possible.

Plasma System Pico

The Pico unit has a chamber size of approximately 5 liters, but an extended chamber is an option for up to 14 liters.  Pico systems are high quality units capable of being utilized in manufacturing applications.


Basic Configuration

- The cabinets vary depending on the components / options
- Chamber volume: depending on the version 4 - 15 liters
- Power supply: 230 V AC for table top systems or
   400 V AC / 3 phases for stand alone systems

Gas supply

- Needle valves
- Mass-Flow-Controllers (MFCs)

Vacuum chambers

- Stainless steel
    round with cover

    (approx. Ø 150 mm, L 320 mm or L 600 mm) or
    rectangular with hinged door
    (approx. W 160 x H 160 x D 325 mm or 600 mm)

- Aluminum
    round with cover or with hinged door

    (approx. inner Ø 130 mm, opening Ø 125 mm, L 300 mm or 600 mm)

- Quartz glass (UHP)
    round with cover or with hinged door

    (approx. inner Ø 130 mm, opening Ø 125 mm, L 300 mm or 600 mm)

- Borosilicate glass (UHP)
    round with cover or with hinged door

    (approx. inner Ø 130 mm, opening Ø 125 mm, L 300 mm or 600 mm)

Loading

  Tray (option: water-cooled), quartz glass boats,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray aluminum, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE-electrode

Timer

- Digital

Generators

- Frequencies:  40 kHz: Power 0 - 200 W

                      13.56 MHz: Power 0 - 50 W; 0 - 100 W; 0 - 300 W

                         2.45 GHz: Power 0 - 300 W

All generators are continuously adjustable from 0 - 100 %

Vacuum Pumps

- in different sizes from different manufacturers

  (if necessary with active carbon filter)

Options

- Spare parts sets

 

- Pressure gauge

 

- Corrosive gas version

 

- Gas bottles

 

- Pressure reducer

 

- Heating plate

 

- Temperature indicator

 

- Heatable chamber

 

- Faraday box

 

- Polymerization equipment

 

- Test ink set, Oxygen generator

 

- Slow ventilation of vacuum chamber

 

- Slow pump down of the vacuum chamber

 

- TEM sample holder flange

 

- Maintenance / service

 

- Documentation in national language

 

- Installation on site including training

Pico Version 1
Pico Version 1 | Thierry Corp. Plasma Systems
Pico Version 2
Pico Version 2 | Thierry Corp. Plasma Systems
Pico Version 3
Pico Version 3 | Thierry Corp. Plasma Systems
Pico Version 4
Pico Version 4 | Thierry Corp. Plasma Systems
Pico Version 5
Pico Version 5 | Thierry Corp. Plasma Systems
Pico Version 6
Pico Version 6 | Thierry Corp. Plasma Systems
Pico Version 7
Pico Version 7 | Thierry Corp. Plasma Systems
 

Thierry Corporation

4319 Normandy Court
Royal Oak, MI 48073, USA

Phone: +1 (248) 549 8565
Fax: +1 (248) 549 3533
plasma@thierry-corp.com
 

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