Low Cost Plasma Systems

Thierry provides the models ZEPTO, ATTO, and YOCTO for more basic treatment needs and simple plasma processes. These low-cost, but full-value plasma units come with chamber sizes up to 10 liters and with semiautomatic control.

Plasma Cleaners

ZEPTO (chamber size approx. 2.6 liters), ATTO (chamber size approx. 10.5 liters), and YOCTO (chamber size approx. 0.3 liters) are being employed by the occasional user or when workpieces have to be treated in smaller numbers.  

Low Cost Plasma Systems

Yocto Plasma System

Technical Data:

Control cabinet:
W 5.9 in, H 3.9 in, D 7.9 in
Chamber:
Ø 1.97 in, L 5.9 in
Chamber volume:
approx. 0.3 liters 
Gas Supply:
1 internal needle valve
Generator:
1 pc. with 40 kHz, 30 Watts
Control:
Main switch, connection for vacuum pump, start button

Zepto Plasma System

Technical Data:

Control cabinet:
W 16.7 in, H 7.3 in, D 17.7 in
Chamber:
Ø 4.1 in, L 11.8 in
Chamber volume:
approx. 2.6 liters 
Gas Supply:
2 gas channels via needle valve
Generator:
1 pc. with 40 kHz, 100 Watts
(Optional: 13.56 MHz, 50 Watts)
Control:
Semi-automatic, PCCE, PC 

Atto Plasma System

Technical Data:

Control cabinet:
W 16.7 in, H 10.8 in, D 17.7 in
Chamber:
Ø 8.3 in, L 11.8 in
Chamber volume:
approx. 10.5 liters
Gas Supply:
2 gas channels via needle valve
Generator:
1 pc. with 40 kHz, 200 Watts
(Optional: 13.56 MHz, 50 Watts)
Control:
Semi-automatic, PCCE, PC 

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