Plasma Cleaner Atto

ZEPTO (chamber size approx. 2.6 liters) and ATTO (chamber size approx. 10.5 liters) are being employed by the occasional user or when workpieces have to be treated in smaller numbers.

Weight

  • approx. 20 kg (44 lbs) without pump

Plasma Chamber

  • Ø 211 mm (8.3 in), L 300 mm (11.8 in)
  • Chamber volume: approx. 10.5 liters (2.77 gallons)

Gas Connection

  • Two gas channels via needle valve without magnetic valve opening

Plasma Power Supply

  • 40 kHz / 200 W, infinitely variable or optional 13.56 MHz / 50 W

Electric Control

  • Manual, Timer, process time

Connections

  • Gas: 6 mm Swagelok, (0.24 in) 
  • Pipe: 4 mm in, 6 mm out (0.16 in, 0.24 in) 
  • Power Supply: 220 V - 240 V AC / 6 A, 50 - 60 Hz 
  • Exhaust tube: Ø 10 mm (0.4 in)

Vacuum Pump

  • Rotary vane pump 5.0 m3 / h (1320 gallons / h)

Options

  • PCCE Controlled System (Microsoft Windows CE) 
  • External PC Control  
  • Quartz Glass Chamber
  • Analog Timer 
  • Pirani Sensor (Pressure Gauge)
  • Dry Pump
  • Spare Parts Set
  • Pressure Reducer
  • Faraday Box
  • Monomer Bottle 
  • Test Ink Set
  • Slow Ventilation of Chamber
  • Slow Pump Down of the Chamber

ATTO VERSION 1

ATTO VERSION 2

ATTO VERSION 3

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