Plasma System Tetra

The Tetra unit has a chamber size of approximately 30 liters, but an extended chamber is one of seveal size options for up to 150 liters.  Tetra systems are high quality units capable of being utilized in manufacturing applications.

Dimensions of Cabinet (19" rack)

  • Approx. W 39.4" x H 70.9" x D 39.4"
  • Weight: approx. 500 or 600 lbs (without pump)

Dimensions of Vacuum Chamber

  • Approx. W 12" x H 11.8" x D 14.6" (8.7 gallons or 30 liters) 
  • Approx. W 12" x H 11.8" x D 24.6" (14.5 gallons or 50 liters) 
  • Approx. W 15.8" x H 15.8" x D 24.6" (26.4 gallons or 100 liters) 
  • Approx. W 15.8" x H 23.6" x D 24.6" (39.6 gallons or 150 liters)
  • Special length of chamber to 98.5"

Gas Connections

  •  2 gas channels via needle valve or Mass Flow Controller (MFC)

Plasma Generator

  • 40 kHz / 0 - 1000 W; 0 - 1500 W; 0 - 2500 W infintely variable
  • 13.56 MHz and 2.45 GHz generators also available
  • Higher wattage available upon request

Electrodes and Trays

  • The system can be equipped with between one and ten trays / electrodes 
  • Rotary drum is optionally available

Hardware Control

  • PCCE-control (Microsoft Windows CE) 
  • Parameters: pump down pressure, process pressure, gas mass flow (ratios), stabilization time, power, process time, flushing time 
  • The PC control is based on an MS Windows computer with an industrial field bus 
  • Gas mass flow, pressure and power are regulated 
  • Two Modes: manual or automatic operation 
  • Parameters: pump down pressure, process pressure, gas mass flow, pressure stabilization time, power, process time, flushing time, ventilation time 
  • Failure settings for: pressure, mass-flow, power, temperature 
  • Miscellaneous: digital pressure regulation, acoustic advice of process-end, vacuum safety switch, compressed air pressure sensor, signal lamp, network interface card

Connections

  • Gas: 6 mm Swagelok 
  • Power supply: 400 V AC / 16 A

Vacuum Pump

  • 2-stage rotary vane pump 
  • Pumping speed: min. 16 m3 /hr 
  • The pump can run with oxygen 
  • Exhaust filter

Available Options

  • 13.56 MHz generator 0 - 300 W; 0 - 600 W
  • 2.45 GHz generator 0 - 850 W; 0 - 1200 W
  • intake filter for vacuum pump
  • carbon exhaust filter
  • automatic door
  • barcode reader
  • bias voltage measurement
  • butterfly valves
  • rotary drum (bulk goods, powder)
  • pressure-reducing valve
  • spare parts set
  • faraday box
  • gas shower
  • heating plate
  • ion measuring sensor
  • corrosive gas version
  • monomer bottle
  • network connection
  • PC-control
  • polymerization accessories
  • RIE electrode
  • safety valve
  • software (also customized)
  • special flanges
  • temperature sensors
  • test inks
  • vacuum pump systems
  • device for powder treatment
  • trays (also customized)
  • service contract
  • additional gas channels controlled via Mass Flow Controller (MFC), needle valves
  • roll to roll (foil treatment)
  • more options on request

TETRA 30 PCCE

TETRA 30 PC

TETRA 100 PCCE

TETRA 100 PC

TETRA 150 PCCE

TETRA 150 PC

Plasma Services

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