ROTARY PLASMA SYSTEMS

Rotary plasma systems are large scale systems with a rotating drum for processing. This rotary drum allows for a plasma treatment of bulk materials. This manipulation of pieces leads to a uniform treatment of the entire surface of the substrates. These systems also have the ability to treat powder.  With treatments to clean, etch, and activate, rotary plasma systems are used primarily for batch production.

More Information about Rotary Plasma Systems

Special Plasma System PDF Brochure


Basic Configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 - 6 liters
- Power supply: 230 V AC for table top systems or
   400 V AC / 3 phases for stand alone systems

Gas supply

- Needle valve
- Mass-Flow-Controller (MFCs)

Vacuum chambers

- Stainless steel
    round with cover
    (approx. Ø 100 mm, L 278 mm oder L 600 mm) or
    rectangular with hinged door
    (approx. W 103 x H 103 x D 285 mm)

- Aluminium
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

- Quartzglass (UHP)
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

- Borosilicate glass (UHP)
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

Loading with
  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes
- One or multi level electrode
- RIE - electrode

Available Options
  • 13.56 MHz generator 0 - 300 W; 0 - 600 W
  • 2.45 GHz generator 0 - 850 W; 0 - 1200 W
  • intake filter for vacuum pump
  • carbon exhaust filter
  • automatic door
  • barcode reader
  • bias voltage measurement
  • butterfly valves
  • rotary drum (bulk goods, powder)
  • pressure-reducing valve
  • spare parts set
  • faraday box
  • gas shower
  • heating plate
  • ion measuring sensor
  • corrosive gas version
  • monomer bottle
  • network connection
  • PC-control
  • polymerization accessories
  • RIE electrode
  • safety valve
  • software (also customized)
  • special flanges
  • temperature sensors
  • test inks
  • vacuum pump systems
  • device for powder treatment
  • trays (also customized)
  • service contract
  • additional gas channels controlled via Mass Flow Controller (MFC), needle valves
  • roll to roll (foil treatment)
  • more options on request
Tetra 150 LF Roll to Roll
Tetra 150 LF roll to roll | Thierry Corp. Plasma Systems
Tetra 500
Tetra 500 | Thierry Corp. Plasma Systems
Tetra 7000 LF PC
Tetra 7000 LF PC | Thierry Corp. Plasma Systems

Thierry Corporation

4319 Normandy Court
Royal Oak, MI 48073, USA

Phone: +1 (248) 549 8565
Fax: +1 (248) 549 3533
plasma@thierry-corp.com
 

Contact form light

Contact Request
*required
**required if you want a callback