THIERRY TETRA 30, 50, 100 AND 150 LITERS

Thierry provides several different Tetra models for many different types of applications. These production, industrial capable plasma units are the standalone models for full production but are fully customizable with all the options possible.

Plasma System Tetra

The Tetra unit has a chamber size of approximately 30 liters, but an extended chamber is one of seveal size options for up to 150 liters.  Tetra systems are high quality units capable of being utilized in manufacturing applications.


Dimensions of Cabinet (19" rack)

- Approx. W 39.4" x H 70.9" x D 39.4"
- Weight: approx. 500 or 600 lbs (without pump)

Dimensions of Vacuum Chamber

- Approx. W 12" x H 11.8" x D 14.6" (8.7 gallons or 30 liters)

- Approx. W 12" x H 11.8" x D 24.6" (14.5 gallons or 50 liters)

- Approx. W 15.8" x H 15.8" x D 24.6" (26.4 gallons or 100 liters)

- Approx. W 15.8" x H 23.6" x D 24.6" (39.6 gallons or 150 liters)
- Special length of chamber to 98.5"

Gas connections

- 2 gas channels via needle valve or Mass Flow Controller (MFC)

Plasma Generator

- 40 kHz / 0 - 1000 W; 0 - 1500 W; 0 - 2500 W

 infintely variable

- 13.56 MHz and 2.45 GHz generators also available

- Higher wattage available upon request

Electrodes and Trays

- The system can be equipped with between one and ten trays / electrodes

- Rotary drum is optionally available

Hardware Control

- PCCE-control (Microsoft Windows CE)

- Parameters: pump down pressure, process pressure, gas mass flow (ratios), stabilization time, power, process time, flushing time

 

- The PC control is based on an MS Windows computer with an industrial field bus

- Gas mass flow, pressure and power are regulated

- Two Modes: manual or automatic operation

- Parameters: pump down pressure, process pressure, gas mass flow, pressure stabilization time, power, process time, flushing time, ventilation time

- Failure settings for: pressure, mass-flow, power, temperature

- Miscellaneous: digital pressure regulation, acoustic advice of process-end, vacuum safety switch, compressed air pressure sensor, signal lamp, network interface card

Connections

- Gas: 6 mm Swagelok

- Power supply: 400 V AC / 16 A

Vacuum Pump

- 2-stage rotary vane pump

- Pumping speed: min. 16 m3 /hr

- The pump can run with oxygen

- Exhaust filter

Available Options

  • 13.56 MHz generator 0 - 300 W; 0 - 600 W
  • 2.45 GHz generator 0 - 850 W; 0 - 1200 W
  • intake filter for vacuum pump
  • carbon exhaust filter
  • automatic door
  • barcode reader
  • bias voltage measurement
  • butterfly valves
  • rotary drum (bulk goods, powder)
  • pressure-reducing valve
  • spare parts set
  • faraday box
  • gas shower
  • heating plate
  • ion measuring sensor
  • corrosive gas version
  • monomer bottle
  • network connection
  • PC-control
  • polymerization accessories
  • RIE electrode
  • safety valve
  • software (also customized)
  • special flanges
  • temperature sensors
  • test inks
  • vacuum pump systems
  • device for powder treatment
  • trays (also customized)
  • service contract
  • additional gas channels controlled via Mass Flow Controller (MFC), needle valves
  • roll to roll (foil treatment)
  • more options on request
Tetra 30 PCCE
Tetra 30 PCCE | Thierry Corp. Plasma Systems
Tetra 30 PC
Tetra 30 PC | Thierry Corp. Plasma Systems
Tetra 100 PCCE
Tetra 100 PCCE | Thierry Corp. Plasma Systems
Tetra 100 PC
Tetra 100 PC | Thierry Corp. Plasma Systems
Tetra 150 PCCE
Tetra 150 PCCE | Thierry Corp. Plasma Systems
Tetra 150 PC
Tetra 150 PC | Thierry Corp. Plasma Systems

Thierry Corporation

4319 Normandy Court
Royal Oak, MI 48073, USA

Phone: +1 (248) 549 8565
Fax: +1 (248) 549 3533
plasma@thierry-corp.com
 

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