---
title: HF Etching
description: HF Etching - Etching with hydrofluoric acid • Buffered HF etching
---

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# [HF Etching](https://www.thierry-corp.com/plasma-knowledgebase/hf-etching)

 Written by [George Osenga](https://www.thierry-corp.com/plasma-knowledgebase/author/george-osenga) | Aug 17, 2021 6:51:36 PM

**HF etching** is a form of wet etching that uses hydrofluoric acid to etch out surfaces rather than using a dry plasma process.  **HF etching** is capable of etching materials such as amorphous silicon dioxide; quartz and glass at very high etch rates. Since  **HF etching** is a wet process, meaning that it uses chemicals, it creates an [isotropic etch](https://www.thierry-corp.com/plasma-knowledgebase/isotropic-etching?hsLang=en). This means that there are curved etched out sections under the etching mask. This is usually not a desirable result because most microfabrication processes require anisotropic etches that [plasma etching](https://www.thierry-corp.com/plasma-technology/applications/plasma-etching?hsLang=en) is capable of achieving.

### Buffered HF Etching

 Buffered  **HF etching** is a commonly used technique in microfabrication. Buffered  **HF etching**, also known as Buffered Oxide etching, uses a mixture of a buffering agent like ammonium fluoride and hydrofluoric acid. Adding the buffering agent to the  **HF etchant** allows for a more precise etch. Regular  **HF etching** reacts too quickly for good control and causes the photoresist etching mask to peel. Buffered  **HF etching** is predominantly used for etching wafers of silicon dioxide or silicon nitride as a part of the integrated circuit fabrication process.

To learn more about etching, check out our eBook titled "[Plasma Etching and Cleaning Strategy for Better Product Quality](https://www.thierry-corp.com/plasma-etching-and-cleaning-strategy-for-better-product-quality?hsLang=en)."

<https://www.thierry-corp.com/plasma-etching-and-cleaning-strategy-for-better-product-quality?hsLang=en>

 

[View full post](https://www.thierry-corp.com/plasma-knowledgebase/hf-etching)

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