THIERRY FEMTO 2 LITERS

Thierry provides several different Femto models for many different types of applications. These production, industrial capable plasma units are the smallest chambers offered but are fully customizable with all the options possible. 

Plasma System Femto

The Femto unit has a chamber size of approximately 2 liters, but an extended chamber is an option for up to 6 liters.  Femto systems are high quality units capable of being utilized in manufacturing applications.


Basic Configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 - 6 liters
- Power supply: 230 V AC for table top systems or
   400 V AC / 3 phases for stand alone systems

Gas supply

- Needle valve
- Mass-Flow-Controller (MFCs)

Vacuum chambers

- Stainless steel
    round with cover
    (approx. Ø 100 mm, L 278 mm or L 600 mm) or
    rectangular with hinged door
    (approx. W 103 x H 103 x D 285 mm)

- Aluminum
    round with cover or with hinged door

    (approx. Ø 95 mm, L 280 mm or L 600 mm)

- Quartz glass (UHP)
    round with cover or with hinged door

    (approx. Ø 95 mm, L 280 mm or L 600 mm)

- Borosilicate glass (UHP)
    round with cover or with hinged door

    (approx. Ø 95 mm, L 280 mm or L 600 mm)

Loading

- Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE-electrode

Control

- Semi automatic

- PCCE-control (Microsoft Windows CE)

- PC-control (Microsoft Windows XPE)

Timer

- Digital

Generators

- Frequencies:    40 kHz: Power 0-100 W

                        13.56 MHz: Power 0 - 50 W; 0 - 300 W

                           2.45 GHz: Power 0 - 100 W; 0 - 300 W

All generators are continuously adjustable from 0 - 100 %

Vacuum pumps

- In different sizes from different manufacturers

(if necessary with active carbon filter)

Options

- Spare parts sets

 

- Pressure gauge

 

- Corrosive gas version

 

- Gas bottles

 

- Pressure reducer

 

- Heating plate

 

- Temperature indicator

 

- Heatable chamber

 

- Faraday box

 

- Polymerization equipment

 

- Test ink set, Oxygen generator

 

- Slow ventilation of vacuum chamber

 

- Slow pump down of the vacuum chamber

 

- TEM sample holder flange

 

- Maintenance / service

 

- Documentation in national language

 

- Installation on site including training

Femto Version 1
Femto Version 1 | Thierry Corp. Plasma Systems
Femto Version 3
Femto Version 3 | Thierry Corp. Plasma Systems
Femto Version 7
Femto Version 7 | Thierry Corp. Plasma Systems
Femto Version 6
Femto Version 6 | Thierry Corp. Plasma Systems
Femto Version 5
Femto Version 5 | Thierry Corp. Plasma Systems
Femto Version 2
Femto Version 2 | Thierry Corp. Plasma Systems
Femto Version 4
Femto Version 4 | Thierry Corp. Plasma Systems
Femto Version 8
Femto Version 8 | Thierry Corp. Plasma Systems

Thierry Corporation

4319 Normandy Court
Royal Oak, MI 48073, USA

Phone: +1 (248) 549 8565
Fax: +1 (248) 549 3533
plasma@thierry-corp.com
 

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