Plasma Treatment Systems


These systems enable many types of plasma treatments to improve the manufacturing of products or university research when the process includes bonding, painting, sealing, printing or coating.

Low Pressure Plasma Systems are specialized vacuum system components designed, assembled and operated for the specific process of producing plasma chemistry safely and repeatedly. They are the number one choice when it comes to plasma technology for treating large substrate areas or depositing thin films. Especially for the latter, good process control and repeatable outcomes are of utmost importance. 

Plasma systems can clean, activate, etch, or coat surfaces in ways not achievable by other surfacing technologies. Different types of plasma systems are required for each application, therefore, there are low pressure and atmospheric pressure systems – as well as variations in size and design. Learn how each type of plasma system is used.


How to Choose a Plasma System - With Comparisons


Low Pressure Plasma Systems

In low pressure plasma systems, plasma is generated in an evacuated chamber containing small metered amounts of the desired process gas flow. This low pressure volume of process gas is then exposed to a source of energy. This source of energy dissociates the molecular structure of the gas causing a percentage of the gas to be converted to a chemically reactive state on an atomic level to implement the desired process chemistry to process your part.

Three-dimensional parts are easily treated. Two or more steps can be conducted successively, such as surface cleaning and surface coating, or cleaning, etching, and activating a device. Low pressure plasma systems are, thus, particularly interesting for high-tech medical applications (e.g. functionalization of parylene or HMDSO surfaces) or microfluidics. These are the fields in which Thierry Corp. has a considerable expertise and vast experience, so check out our low pressure plasma systems.


Atmospheric Plasma System Technology

Atmospheric plasma systems allow for a truly continuous plasma process. The plasma applicator is connected to the supply unit with a flexible umbilical. This allows for easy integration into existing robotic controlled manufacturing lines or hand manipulated systems. While the plasma cleans and activates the surface, the jet provides an additional cleaning effect by blowing away loose particles.

Atmospheric pressure plasma jets also don’t require costly vacuum chambers and the treatment time is usually very low (depending a little bit on the substrate material, of course). Thierry Corp.’s favorite atmospheric pressure plasma technology is the PlasmaBeam System.

With Atmospheric PlasmaBeam technology, the system operates without a chamber. Instead, the plasma is generated within a nozzle (the plasma applicator) and expelled by a jet of compressed air. As a result, the plasma produced works well for directed in-line manufacturing applications.


Custom Plasma Systems

Custom plasma systems can implement your plasma process needs while fitting into your existing manufacturing lines. Every manufacturing process is different and so are the needs for custom sized low pressure plasma systems. Many manufacturers require a custom built system to accommodate their unique specifications.

There are a lot of different parameters that can be specified according to your needs. This includes the type of plasma source, the chamber size, the degree of automation, the range of the desired gas flow rates, or other configuration types such as electrode configuration or driving frequency (e.g. 13.56 MHz, 2.45 GHz, etc.). 

Manufacturers should consider the two main aspects when deciding which system is best. The amount of materials to be treated and the size of the parts to be treated. We have the ability to produce custom systems up to 40,000 liters for large device processing.


Vacuum Chambers & Accessories

The process of manufacturing a low pressure plasma system requires a strong understanding of vacuum chambers and vacuum related components. This source of industrial hardware is in demand by industry and university research teams that perform work that is not specifically related to plasma technology or plasma science. A well designed, and industry tested line of vacuum chambers and related products are available to satisfy this market need.

Our low pressure custom vacuum chambers are commonly used in high altitude testing, material drying, or out gassing, just to name a few. These chambers have very easy programming and control systems that make operation straightforward. Whatever your requirements are, Thierry Corp. can help you with your custom-tailored vacuum chamber and the accessories that go with it. Click on the link below and...

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