Plasma Technology
 
Plasma Indicators

Process Control Units for Plasma Systems  

Controls are needed to adjust plasma-based manufacturing devices in modern production processes. Thierry Corp. offers the following control systems for fast and accurate setting of your plasma process parameters.

csm_Diener_electronic_voll-pc_d15733670b

Full PC process control  The control unit is fully connected to any PC or laptop

  • It uses Windows 10 IoT as the operating system
  • The user can choose from two modes:
    • Manual mode: Allows manual adjustments to the system via a dialogue interface
    • Automatic mode: Executes a previously set process automatically
    • The control program allows to run of up to 100 automatic processes, each with 10 sub-programms
    • The user can vary the following free parameters: Starting pressure for the process, max. pump-down time, working pressure, gas flow rates and their ratios (in case of gas mixtures), stabilization time, HF duration and output, rinse, and ventilation time

More Features

  • Fully computer-controlled process steering
  • Integrated PC control system
  • Windows 10 IoT as the standard operating system (other operating systems can be delivered on request)
  • Compressed-air monitoring included
  • The control can handle up to 100 automatic processes, each with 10 sub-programs
  • Process data can be saved as an Excel file or as a diagram
  • Automatic data export to another network computer via the integrated network board
  • The user can choose from two modes:
    • Manual mode: Allows manual adjustments to the system via a dialogue interface
    • Automatic mode: Executes a previously set process automatically
    • The user can vary the following free parameters: Starting pressure for the process, max. pump-down time, working pressure, gas flow rates and their ratios (in case of gas mixtures), stabilization time, HF duration and output, rinse and ventilation time
    • The user can set error limits for gas flow rates, working gas pressure and HF output for MHz or rf plasma
  • Integrated PI/PID controller allows a digital pressure control, i.e. not only the gas flows are constant but also the working gas pressure
  • Real-time pressure control over the entire duration of the plasma process
  • Advanced safety settings: E.g. the control unit is disabled during the opening of the vacuum system
  • A full overview of the vacuum chamber settings: The state of the door switch, temperature safety switch and vacuum switch are displayed.
  • An individual batch number and the name of the operator can be entered
  • Individual maintenance intervals can be programmed, depending on the operation schedule
  • The sensitivity of the pressure control is adjustable
  • All alarms are saved into an alarm archive for further inspection
  • The systems provide detailed error messages, e.g. the actual gas flow of gas 1 heavily deviates from the set point
  • All diagrams can be displayed in full-screen mode
  • Re(programming) of the system is only possible with the correct password (for safety reasons)
  • All saved process routines as well as the file information can be retrieved at any time from the data archive
  • Process intervals can be defined for the rotary drum (e.g. rotate 30 sec., stop 60 sec., rotate 30 sec., etc.)
  • Full control of the gas supply by the specification of the set points for the mass flow controllers (MFC), while the actual current values are shown on the display
  • Settings can be made process-independent but dependent on the system and on customers’ needs (gas types, mass flow controllers, pressure regulators, cooling water, storage location and type)
  • The control unit comes with English and German as standard languages but other languages can be added optionally upon request
  • The control is equipped with a red and green signal light

The following options are available on request:

  • Electrode monitoring: Manages different electrodes and electrode configurations (e.g. electrodes for the rotary drum or tier electrodes)
  • Marking the end of a process by an acoustic signal
  • Evaporator timing
  • Temperature indicators can be regulated
  • Real-time Readout of the cooling water temperature
  • Remote process diagnosis
  • Printout of the log file via a standard printer (note that the printer is not included in the delivery of the control unit)
  • Customizable diagram layout
  • Additional monitoring for the DC bias source
  • Bar code reader
  • Pulsed HF generator
  • Extra temperature display
csm_Simens_SPS_Steuerung_57b1a52a90

PLC process control

  • The entire control system is steered via a PC
  • Manufactured by Siemens
  • Two modes are available:
    • Manual mode: Allows the manual operation of the system via a dialogue box
    • Automatic mode: Previously generated processes will be run automatically
  • Up to 100 automated processes can be defined, including 10 sub-routines each
  • Free choice of the following parameters: Start Pressure for the process, max. pump-down time, mass flow (ratios) of the working gases, working gas pressure, stabilization time, HF output, process duration with HF switched on, rinse and ventilation time
csm_Diener_electronic_pcce_34dd3a97af

Basic PC process control

  • Our newly developed control software is optimized specifically for plasma technology-based processes
  • The control software for PCs runs on Windows CE
  • The device has a standard 3.5” TFT touch display (an upgrade to 7” is possible)
  • The software can control processes either in manual or automatic mode
  • Up to 50 individual programs can be stored directly on this control device
  • Free choice of the following parameters: Start Pressure for the process, max. pump-down time, mass flow (ratios) of the working gases, working gas pressure, stabilization time, HF output, process duration with HF switched on, rinse and ventilation time

More Features

  • The standard control unit has a 3.5” TFT touch screen display, which can be upgraded to a 7” display. The fully colored user interface has a Windows look to enable easy and intuitive usage. While normal LCD displays come without touch function, our display needs no additional keyboard, or other add-ons.
  • Windows CE operating system
  • Two modes are available:
    • Manual mode:
      • All elements in the plasma process can be switched on and off just by touching the corresponding icon.
      • Individual set points for the process steps can be set via the touch screen
      • Each set point can be adjusted in a context menu on the touch screen by using the virtual +/- switches.
    • Automatic mode:
      • Up to 50 individual programs can be created, which can then run automatically
      • No need for an external PC or laptop, the programs can be entered directly via the touch screen
      • Each program can be named individually
      • All relevant processes can be read out chronologically in a separate curve chart
  • The main screen shows the current process step and the elapsed time
  • The device has an alarm list for error detection and displays alarms or malfunctions with flashing LEDs.
  • The control unit has two default languages (English and German), other languages can be requested
  • The device has an Ethernet connection for remote access
  • Programs, alarms, process parameters, etc. can be stored on USB sticks via the provided port
  • There are no mechanical parts like fans or hard discs in the control unit, which makes it maintenance-free
  • Extremely short hard- and software boot time
  • Data from the plasma process can be saved on a memory card within the control unit (txt format) and transferred to a USB stick. If the Data logging option has been ordered, the stored data can be read out directly, e. g. in Excel.
  • The touch panel control unit can be remote-controlled from external devices via Ethernet (note that this requires the order of the remote-control option)
  • If MHz plasma sources are used, a FULL PC controlled is strongly recommended
csm_Diener_electronic_Drehschalter_fb11001ae4

Rotary switch process control

  • The entire plasma process can easily be operated via one rotary knob
  • Up to the plasma treatment, the control can be either semi- or fully automatic, depending on the operation mode
  • If the button is turned clockwise up to “Process”, the plasma treatment is fully automatic
  • The vacuum chamber is manually vented by choosing the switch position ‘Flood’
  • The processing time, output, process gas species, and pressure are free parameters
csm_Diener_electronic_halbautomatisch_cab774c126

Semi-automatic process control

  • The processes are steered semi-automatically
  • The gas flow, pump, ventilation, and the plasma process have to be started by hand
  • The processing time, output, process gas species, and pressure can be chosen as free parameters

Plasma control units quotation

Plasma control units quotation

Request a Quote Contact us

Frequently Asked Questions

Which types of plasma control systems are available?

Our customers can choose between full PC control, basic PC control, PLC control, rotary switch control, and semi-automatic control units.

Can the process parameters be stored?

Yes, the process parameters, error alarms, etc. can be stored on a memory chip on the device itself and exported via the USB port or the Ethernet connection. Some of those process parameters can be read out in real time.

Which language options do I have?

The standard options are English and German but we can provide other language options on request.

Can I pre-set process programs?

Yes, of course. Depending on the control unit type up to 100 programs with up to 10 sub-routines for each can be pre-set and will be executed automatically.

Which data formats and operating systems do the control units support?

The main format for data storage is .txt and the standard operating systems are Windows CE and Windows 10 IoT.