Plasma Treatment Systems

Filter by your requirements:

System Type
Name
Volume
Control
Femto

Femto Version 1

Control Cabinet:
W 310 mm H 330 mm D 420 mm

Chamber:
Ø 3.9 in, L 10.9 in

Chamber Volume:
2

Gas Supply:
1 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Femto

Femto Version 2

Control Cabinet:
W 310 mm H 330 mm D 420 mm

Chamber:
Ø 3.9 in, L 10.9 in

Chamber Volume:
2

Gas Supply:
1 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Femto

Femto Version 3

Control Cabinet:
W 310 mm H 330 mm D 420 mm

Chamber:
Ø 3.9 in, L 10.9 in

Chamber Volume:
2

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Femto

Femto Version 4

Control Cabinet:
W 310 mm H 560 mm D 420 mm

Chamber:
Ø 3.9 in, L 10.9 in

Chamber Volume:
2

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Femto

Femto Version 5

Control Cabinet:
W 310 mm H 330 mm D 420 mm

Chamber:
Ø 3.9 in, L 10.9 in

Chamber Volume:
2

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Touch Screen

Femto

Femto Version 6

Control Cabinet:
W 560 mm H 560 mm D 420 mm

Chamber:
Ø 3.9 in, L 10.9 in

Chamber Volume:
2

Gas Supply:
1 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Femto

Femto Version 7

Control Cabinet:
W 560 mm H 560 mm D 420 mm

Chamber:
Ø 3.9 in, L 10.9 in

Chamber Volume:
2

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Touch Screen

Femto

Femto Version 8

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
Ø 3.9 in, L 10.9 in

Chamber Volume:
2

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Pico

Pico Version 1

Control Cabinet:
W 310 mm H 330 mm D 420 mm

Chamber:
Ø 5.9 in, L 12.6 in

Chamber Volume:
5

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Pico

Pico Version 2

Control Cabinet:
W 560 mm H 560 mm D 420 mm

Chamber:
Ø 5.9 in, L 12.6 in

Chamber Volume:
5

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Pico

Pico Version 3

Control Cabinet:
W 560 mm H 560 mm D 420 mm

Chamber:
Ø 5.9 in, L 12.6 in

Chamber Volume:
5

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Pico

Pico Version 4

Control Cabinet:
W 310 mm H 330 mm D 420 mm

Chamber:
Ø 5.9 in, L 12.6 in

Chamber Volume:
5

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Touch Screen

Pico

Pico Version 5

Control Cabinet:
W 560 mm H 600 mm D 420 mm

Chamber:
Ø 5.9 in, L 12.6 in

Chamber Volume:
5

Gas Supply:
3 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Pico

Pico Version 6

Control Cabinet:
W 560 mm H 600 mm D 420 mm

Chamber:
Ø 5.9 in, L 12.6 in

Chamber Volume:
5

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Pico

Pico Version 7

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
Ø 5.9 in, L 12.6 in

Chamber Volume:
5

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Nano

Nano Version 1

Control Cabinet:
W 560 mm H 600 mm D 600 mm

Chamber:
Ø 10.5 in, L 16.5 in

Chamber Volume:
24

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Nano

Nano Version 2

Control Cabinet:
W 560 mm H 600 mm D 600 mm

Chamber:
Ø 10.5 in, L 16.5 in

Chamber Volume:
24

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Nano

Nano Version 3

Control Cabinet:
W 560 mm H 600 mm D 600 mm

Chamber:
Ø 10.5 in, L 16.5 in

Chamber Volume:
24

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Nano

Nano Version 4

Control Cabinet:
W 560 mm H 600 mm D 600 mm

Chamber:
Ø 10.5 in, L 16.5 in

Chamber Volume:
24

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Touch Screen

Nano

Nano Version 5

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
Ø 10.5 in, L 16.5 in

Chamber Volume:
24

Gas Supply:
2 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Semi-Automatic

Nano

Nano Version 6

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
Ø 10.5 in, L 16.5 in

Chamber Volume:
24

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Tetra

Tetra 30 PCCE

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
W 12" x H 11.8" x D 14.6"

Chamber Volume:
30

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Touch Screen

Tetra

Tetra 30 PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
W 12" x H 11.8" x D 14.6"

Chamber Volume:
30

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Tetra

Tetra 50 PCCE

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
W 12" x H 11.8" x D 24.6"

Chamber Volume:
50

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Touch Screen

Tetra

Tetra 50 LF PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
W 12" x H 11.8" x D 24.6"

Chamber Volume:
50

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Tetra

Tetra 100 PCCE

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
W 15.8" x H 15.8" x D 24.6"

Chamber Volume:
100

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Touch Screen

Tetra

Tetra 100 PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
W 15.8" x H 15.8" x D 24.6"

Chamber Volume:
100

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Tetra

Tetra 150 PCCE

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:
W 15.8" x H 23.6" x D 24.6"

Chamber Volume:
150

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
Touch Screen

Tetra

Tetra 150 PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:
W 15.8" x H 23.6" x D 24.6"

Chamber Volume:
150

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 15-LF-PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:

Chamber Volume:
15

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 30-LF-PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
W 12" x H 11.8" x D 14.6"

Chamber Volume:
30

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 100-LF-PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:
W 15.8" x H 15.8" x D 24.6"

Chamber Volume:
100

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 120-LF-PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:

Chamber Volume:
120

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 130-LF-PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:

Chamber Volume:

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 140-LF-PC

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:

Chamber Volume:
140

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 140-LF-PC-2

Control Cabinet:
W 600 mm H 1700 mm D 800 mm

Chamber:

Chamber Volume:
140

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 150-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:
W 15.8" x H 23.6" x D 24.6"

Chamber Volume:
150

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 240-LF-PC

Control Cabinet:
W 870 mm H 1860 mm D 1400 mm

Chamber:

Chamber Volume:
240

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 260-LF-PC

Control Cabinet:
W 870 mm H 1860 mm D 1400 mm

Chamber:

Chamber Volume:
260

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 375-LF-PC

Control Cabinet:
W 870 mm H 1860 mm D 1400 mm

Chamber:

Chamber Volume:
375

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 400-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
400

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 420-LF-PC-PCB

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
420

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 500-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
500

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 575-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
575

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 600-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
600

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 600-LF-PC-D V1

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
600

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 600-LF-PC-D V 2

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
600

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 2000-RF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
2000

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 2400-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
2400

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 2800-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
2800

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 4400-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
4400

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 5600-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
5600

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 7000-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
7000

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 7500-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
7500

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 8000-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
8000

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Special Tetra

Special Tetra 12600-LF-PC

Control Cabinet:
W 600 mm H 2100 mm D 800 mm

Chamber:

Chamber Volume:
12600

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC

Yocto

Yocto Version 1

Control Cabinet:
W 150 mm H 100 mm D 450 mm

Chamber:
Ø 1.97 in, L 5.9 in

Chamber Volume:
.3

Gas Supply:
1 gas channel via needle valve

Generator:
1 pc. with 40 kHz

Control:
Semi-Automatic

Zepto

Zepto Version 1

Control Cabinet:
W 425 mm H 185 mm D 450 mm

Chamber:
Ø 4.1 in, L 11.8 in

Chamber Volume:
2.6

Gas Supply:
1 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)

Control:
Semi-Automatic

Zepto

Zepto Version 2

Control Cabinet:
W 425 mm H 185 mm D 450 mm

Chamber:
Ø 4.1 in, L 11.8 in

Chamber Volume:
2.6

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)

Control:
Rotary Control

Zepto

Zepto Version 3

Control Cabinet:
W 425 mm H 185 mm D 450 mm

Chamber:
Ø 4.1 in, L 11.8 in

Chamber Volume:
2.6

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)

Control:
Touch Screen

Zepto

Zepto Version 4

Control Cabinet:
W 425 mm H 185 mm D 450 mm

Chamber:
Ø 4.1 in, L 11.8 in

Chamber Volume:
2.6

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)

Control:
External PC

Atto

Atto Version 1

Control Cabinet:
W 425 mm H 275 mm D 450 mm

Chamber:
Ø 8.3 in, L 11.8 in

Chamber Volume:
10.5

Gas Supply:
1 gas channel via needle valve

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)

Control:
Semi-Automatic

Atto

Atto Version 2

Control Cabinet:
W 425 mm H 275 mm D 450 mm

Chamber:
Ø 8.3 in, L 11.8 in

Chamber Volume:
10.5

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)

Control:
Rotary Control

Atto

Atto Version 3

Control Cabinet:
W 425 mm H 275 mm D 450 mm

Chamber:
Ø 8.3 in, L 11.8 in

Chamber Volume:
10.5

Gas Supply:
Mass flow controllers

Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz)

Control:
Touch Screen

APC 500

APC 500 Corona Plasma Source

Control Cabinet:
W 562 mm H 211 mm D 450 mm

Chamber:

Chamber Volume:

Gas Supply:

Generator:
1 pc. with 40 kHz

Control:
Semi-Automatic

Plasma Beam

Plasma Beam

Control Cabinet:
W 562 mm H 211 mm D 450 mm

Chamber:

Chamber Volume:

Gas Supply:

Generator:
1 pc. with 40 kHz

Control:
Semi-Automatic

Plasma Beam PC

Plasma Beam PC

Control Cabinet:
W 562 mm H 211 mm D 450 mm

Chamber:

Chamber Volume:

Gas Supply:

Generator:
1 pc. with 40 kHz

Control:
PC

Plasma Beam Duo

Plasma Beam Duo

Control Cabinet:
W 562 mm H 211 mm D 450 mm

Chamber:

Chamber Volume:

Gas Supply:

Generator:
1 pc. with 40 kHz

Control:
Semi-Automatic

Plasma Beam Duo

Plasma Beam Duo

Control Cabinet:
W 562 mm H 360 mm D 650 mm

Chamber:

Chamber Volume:

Gas Supply:

Generator:
1 pc. with 40 kHz

Control:
PC

Consultation

Request a Plasma System Selection Call