More Information about Rotary Plasma Systems

Basic Configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 - 6 liters
- Power supply: 230 V AC for table top systems or
   400 V AC / 3 phases for stand alone systems

Gas supply
- Needle valve
- Mass-Flow-Controller (MFCs)

Vacuum chambers
- Stainless steel
    round with cover
    (approx. Ø 100 mm, L 278 mm oder L 600 mm) or
    rectangular with hinged door
    (approx. W 103 x H 103 x D 285 mm)
- Aluminium
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)
- Quartzglass (UHP)
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)
- Borosilicate glass (UHP)
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

Loading with
  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

- One or multi level electrode
- RIE - electrode

Available Options

  • 13.56 MHz generator 0 - 300 W; 0 - 600 W
  • 2.45 GHz generator 0 - 850 W; 0 - 1200 W
  • intake filter for vacuum pump
  • carbon exhaust filter
  • automatic door
  • barcode reader
  • bias voltage measurement
  • butterfly valves
  • rotary drum (bulk goods, powder)
  • pressure-reducing valve
  • spare parts set
  • faraday box
  • gas shower
  • heating plate
  • ion measuring sensor
  • corrosive gas version
  • monomer bottle
  • network connection
  • PC-control
  • polymerization accessories
  • RIE electrode
  • safety valve
  • software (also customized)
  • special flanges
  • temperature sensors
  • test inks
  • vacuum pump systems
  • device for powder treatment
  • trays (also customized)
  • service contract
  • additional gas channels controlled via Mass Flow Controller (MFC), needle valves
  • roll to roll (foil treatment)
  • more options on request




Rotary Plasma Systems

Rotary plasma systems consist of a rotating container within a low pressure plasma system that allows plasma treatment of a large number of small items such as small gaskets, fasteners, powders or medical device components. Many available plasma systems can easily be converted to or purchased as rotary plasma systems because they are designed so that the container and rotator motor can be incorporated at the time of final plasma system assembly. Rotary plasma systems offer an extremely efficient means to alter the surface energy of small objects.

Rotary Plasma Systems - Operating Principle

Within the rotary plasma systems there is a metal or glass container that is designed to provide the best part containment and plasma access combination. For example, small part rotary plasma systems generally use a perforated stainless steel drum with a hole size that precludes the parts from falling out but allows the plasma in. Rotary plasma systems for plasma treatment are often jar-like in configuration and roll the powder on the containers inner surfaces. This insures all of the surfaces of the powder are exposed to the plasma entering through the mouth of the jar-like container.

Powder Treatment Systems

Powder treatment systems can become quite sophisticated as powders are often extremely light and prone to being blown, poured or otherwise spilled from the plasma treatment container. To counter these risks, the treatment containers are fixed at angles advantageous to retaining the powder and controls to prevent rapid pressure changes are incorporated into the plasma systems.

Powder Treatment

Treated powders may be made hydrophilic or hydrophobic. A plasma coating may also be applied. For example, some powders are used as adhesives. To adhere objects together the powder is placed between the objects and melted to adhere the objects together. Some powder surfaces change with exposure to the environment during storage or have surface contamination. Plasma treatment of these powders cleans their surfaces allowing them to better melt into one another when used in the manufacture of an end product.

Plasma Services

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