Low Pressure Plasma Systems

In low pressure plasma systems, plasma is generated in an evacuated chamber containing small amounts of the desired precursor gas.  Three-dimensional parts that have different geometries are easily treated.  Two or more steps can be conducted successively, such as surface cleaning and surface coating, or cleaning, etching, and activating.

Low pressure plasma systems are always operated in batch mode, which is ideal for product testing, research, and development.  Nevertheless, their ease of handling, high degree of automation, and a comprehensive range of accessories make Thierry's plasma systems the right choice for highly efficient batch production. 

  • Small-scale series production – clean and activate parts before soldering, bonding, or printing
  • Analytics - treatment with plasma for SEM (scanning electron microscope) samples  
  • Medical technology – a plasma cleaning treatment can sterilize or engineer surface properties (hydrophilic, hydrophobic, and contact angle)

Low Pressure Plasma Systems

Thierry plasma systems offer many customizable options for plasma treatment.  Options include Femto, Pico, Nano, and Tetra.  All of these systems can be tailored to the plasma treatment desired by the consumer.  These options include:

  • Generator size
  • Stainless steel or glass (borosilicate or quartz) chamber
  • Corrosive gas version
  • Semi-automatic control, automatic control, PC control, PCCE control
  • Additional gas channels
  • Spare parts kit 
  • Many more options available

Plasma Treatment Applications

Applications for plasma treatment using low pressure plasma systems include but are not limited to:

  • Automotive
  • Elastomer industry
  • Electronics
  • Micro systems technology
  • Plastics industry
  • Semiconductor industry
  • Textile treatment

Low Pressure Plasma Systems

Femto Plasma System Version 1

Technical Data:

Control Cabinet:
W 13.6 in, H 16.5 in, D 8.3 in
Chamber:
Ø 3.9 in, L 10.9 in
Chamber Volume:
approx. 2 liters 
Gas Supply:
1 gas channel via needle valve
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-automatic

Pico Plasma System Version 1

Technical Data:

Control Cabinet:
W 22.0 in, H 19.7 in, D 13.0 in
Chamber:
Ø 5.9 in, L 12.6 in
Chamber Volume:
approx. 5 liters 
Gas Supply:
2 gas channels via needle valves
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-automatic

Nano Plasma System Version 1

Technical Data:

Control Cabinet:
W 22.0 in, H 23.6 in, D 25.6 in
Chamber:
Ø 10.5 in, L 16.5 in
Chamber Volume:
approx. 24 liters 
Gas Supply:
2 gas channels via needle valves
Generator:
1 pc. with 40 kHz
(optional: 13.56 MHz or 2.45 GHz)
Control:
Semi-automatic

Thierry Tetra 30, 50, 100 And 150 Liters

Technical Data:

Control Cabinet:
W 39.4 in, H 70.9 in, D 39.4 in
Chamber:
~W 12" x H 11.8" x D 14.6" (8.7 gallons or 30 liters)
~W 12" x H 11.8" x D 24.6" (14.5 gallons or 50 liters)
~W 15.8" x H 15.8" x D 24.6" (26.4 gallons or 100 liters)
~W 15.8" x H 23.6" x D 24.6" (39.6 gallons or 150 liters)
Gas Supply:
2 gas channels via needle valve or Mass Flow Controller (MFC)
Generator:
40 kHz / 0 - 1000 W; 0 - 1500 W; 0 - 2500 W infintely variable
13.56 MHz and 2.45 GHz generators also available
Control:
PCCE-control (Microsoft Windows CE) 

Plasma Services

Learn About Thierry's Plasma Services Read More

Connect With Thierry

Do you have questions or comments for us?  Send us an email or request a call back and a Thierry representative will get back with you as soon as possible.

Contact Us