Plasma System Femto

The Femto unit has a chamber size of approximately 2 liters, but an extended chamber is an option for up to 6 liters. Femto systems are high quality units capable of being utilized in manufacturing applications.

Basic Configuration

  • The outer body varies depending on the components / options
  • Chamber volume: depending on the version 1,9 - 6 liters
  • Power supply: 230 V AC for table top systems or 400 V AC / 3 phases for stand alone systems

Gas Supply

  • Needle valve
  • Mass-Flow-Controller (MFCs)

Vacuum Chambers

  • Stainless steel round with cover (approx. Ø 100 mm, L 278 mm or L 600 mm) or rectangular with hinged door (approx. W 103 x H 103 x D 285 mm)
  • Aluminum round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm)
  • Quartz glass (UHP) round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm)
  • Borosilicate glass (UHP) round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm)

Loading

  • Tray (option: water-cooled), quartz glass boat, rotary drum for powder, rotary drum for bulk materials, flat tray aluminium, flat tray stainless steel, flat tray borosilicate glass, flat tray quartz glass

Electrodes

  • One or multi level electrode
  • RIE-electrode

Control

  • Semi automatic
  • PCCE-control (Microsoft Windows CE)
  • PC-control (Microsoft Windows XPE)

Timer

  • Digital

Generators

  • Frequencies: 
    • 40 kHz: Power 0-100 W
    • 13.56 MHz: Power 0 - 50 W; 0 - 300 W
    • 2.45 GHz: Power 0 - 100 W; 0 - 300 W
    • All generators are continuously adjustable from 0 - 100 %

Vacuum Pumps

  • In different sizes from different manufacturers
    (if necessary with active carbon filter)

Options

  • Spare parts sets
  • Pressure gauge
  • Corrosive gas version
  • Gas bottles
  • Pressure reducer
  • Heating plate
  • Temperature indicator
  • Heatable chamber
  • Faraday box
  • Polymerization equipment
  • Test ink set, Oxygen generator
  • Slow ventilation of vacuum chamber
  • Slow pump down of the vacuum chamber
  • TEM sample holder flange
  • Maintenance / service
  • Documentation in national language
  • Installation on site including training

FEMTO VERSION 1

FEMTO VERSION 2

FEMTO VERSION 3

FEMTO VERSION 4

FEMTO VERSION 5

FEMTO VERSION 6

FEMTO VERSION 7

FEMTO VERSION 8

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