Plasma System Pico

The Pico unit has a chamber size of approximately 5 liters, but an extended chamber is an option for up to 14 liters.  Pico systems are high quality units capable of being utilized in manufacturing applications.

Basic Configuration

  • The cabinets vary depending on the components / options
  • Chamber volume: depending on the version 4 - 15 liters
  • Power supply: 230 V AC for table top systems or 400 V AC / 3 phases for stand alone systems

Gas Supply

  • Needle valves
  • Mass-Flow-Controllers (MFCs)

Vacuum Chambers

  • Stainless steel round with cover (approx. Ø 150 mm, L 320 mm or L 600 mm) or rectangular with hinged door (approx. W 160 x H 160 x D 325 mm or 600 mm)
  • Aluminum round with cover or with hinged door (approx. inner Ø 130 mm, opening Ø 125 mm, L 300 mm or 600 mm)
  • Quartz glass (UHP) round with cover or with hinged door (approx. inner Ø 130 mm, opening Ø 125 mm, L 300 mm or 600 mm)
  • Borosilicate glass (UHP) round with cover or with hinged door (approx. inner Ø 130 mm, opening Ø 125 mm, L 300 mm or 600 mm)

Loading

  •   Tray (option: water-cooled), quartz glass boats, rotary drum for powder, rotary drum for bulk materials, flat tray aluminum, flat tray stainless steel, flat tray borosilicate glass, flat tray quartz glass

Electrodes

  • One or multi level electrode
  • RIE-electrode

Timer

  • Digital

Generators

  • Frequencies: 
    • 40 kHz: Power 0 - 200 W
    • 13.56 MHz: Power 0 - 50 W; 0 - 100 W; 0 - 300 W
    • 2.45 GHz: Power 0 - 300 W
    • All generators are continuously adjustable from 0 - 100 %

Vacuum Pumps

  • in different sizes from different manufacturers
  • (if necessary with active carbon filter)

Options

  • Spare parts sets
  • Pressure gauge
  • Corrosive gas version
  • Gas bottles
  • Pressure reducer
  • Heating plate
  • Temperature indicator
  • Heatable chamber
  • Faraday box
  • Polymerization equipment
  • Test ink set, Oxygen generator
  • Slow ventilation of vacuum chamber
  • Slow pump down of the vacuum chamber
  • TEM sample holder flange
  • Maintenance / service
  • Documentation in national language
  • Installation on site including training

PICO VERSION 1

PICO VERSION 2

PICO VERSION 3

PICO VERSION 4

PICO VERSION 5

PICO VERSION 6

PICO VERSION 7

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