Plasma Etching

Plasma etching involves a high-speed stream of glow discharge (plasma) of an appropriate gas mixture being shot (in pulses) at a sample.

• Dry Etching and Wet Etching
• What Industries Plasma Etching is used in
• Industries that a Plasma Asher is used in
• Plasma Asher Tailored to the Customer
• Plasma Etching Tailored to the Customer
• Applications of a Plasma Asher
• Desmearing
• What is Dry Etching?
• Plasma Etcher
• Etching Silicon with Plasma
• Oxide Etch
• What is a Plasma Asher?
• Etching Mask
• Steps of Dry Etching (Plasma Etching) and Wet Etching
• Isotropic Etching
• What is Plasma Ashing?
• Reactive Ion Etching (RIE)
• Anisotropic Etching vs. Isotropic Etching
• Oxygen Plasma Etching
• HF Etching