Plasma Knowledge

Steps of Dry Etching (Plasma Etching) and Wet Etching
 
As mentioned previously, dry etching and wet etching are the two main types of etching. Wet etching includes multiple chemical reactions. It involves the following three steps:
  • 1. Diffusion of the liquid etchant to the material (that needs to be etched)
  • 2. Reaction between the liquid etchant and the material
  • 3. Desorption of the byproducts from the surface
An example of dry etching is plasma etching. Plasma etching in plasma etching systems involves the following six steps:
  • 1. Production of the reactive species in a plasma
  • 2. Diffusion of the reactive species onto the material’s surface
  • 3. Adsorption of the reactive species onto the material’s surface
  • 4. Reaction (chemical) between reactive species and material that forms volatile byproducts
  • 5. Desorption of the volatile byproducts
  • 6. Diffusion of these byproducts into the bulk gas and expelled through vacuum system.
Dyne Levels and Plasma Etching Technologies
 
Plasma technologies can increase the surface energy of materials. The dyne levels reveal the surface wettability. As the dyne level increases, the wettability and adhesion of the material increases as well. Free surface energy has to be much greater than the surface tension of the liquid (by a recommended level of at least 2 to 10 dynes) in order to achieve good wettability. The different ways to measure wettability include measuring the contact angle or by using Dyne test solutions. Dyne solutions are fast and easy to use. After applying a thin layer of the dyne solution to the material, if beads of the solution form, then it indicates that the surface energy of the material is lower than the dyne level of the Dyne solution. Plastics generally have lower surface energies due to less available bonding sites, meaning that it is difficult for liquids to wet out on the surface. Wetting the surface is necessary to glue plastics to other objects or to paint the plastic’s surface. If a good wettability is not achieved, the objects may lose adhesion. Another way to improve bonding is to use plasma etching with a plasma etching machine. As a result, Plasma etching increases the surface area of the material and increases bonding.
 
A Plasma System to Suit Each Application & Advantages of Plasma-enhanced Chemical Vapor Deposition (PECVD)Adhesion Science & Adhesion TreatmentsAnisotropic Etching & The Methods and Uses for Anisotropic EtchingApplications of a Plasma Asher & Surface ModificationArgon Plasma & Argon Plasma Role in Micro-SandblastingAtmospheric Pressure Plasma & Applications of Atmospheric Pressure PlasmaBonding Polyethylene & Using Plasma for Bonding PolyethyleneCoating PVD & Advantages and Disadvantages of Coating PVDContact Angle Measurements & How to Measure Contact AnglesCorona Discharge & The Properties of Corona DischargesCorona Treatment & The Differences between Corona Treatment and Atmospheric PlasmaCVD & Plasma Enhanced CVDDifferences between the Types of Plasma Treatments, Specifically Plasma Coating & Plasma Treatments IntroductionDry Etching & Dry Etching vs. Wet EtchingDry Etching (Plasma Etching) and Wet Etching & Advantages and Disadvantages of Dry Etching (Plasma Etching) and Wet EtchingDyne Levels & Determining a Dyne Level Using a Dyne TestDyne Testing & More about Dyne TestingEtching Silicon & How Etching Silicon is DoneEvaporated Coatings & Methods of Applying Evaporated CoatingsHF Etching & Buffered HF EtchingHistory of Plasma Treatment & Why Powder Plasma Treatment?How to Measure Surface Tension & More Methods of Measuring Surface TensionHydrogen H2 Plasma & Oxide-Layer Reduction with Hydrogen PlasmaHydrogen Peroxide Plasma & The Advantages and Uses of Hydrogen Peroxide Plasma SterilizationHydrophilic Treatment & How Hydrophilic Treatment WorksHydrophobic Coatings vs. Hydrophilic Coatings & Uses for Hydrophobic CoatingsInductive Plasma & The Application of Inductive PlasmaIndustries That a Plasma Asher is Used In & Plasma Etch Customer Parts (Plastic, Metal, Glass)Intelligent Textiles & The Possible Applications of Intelligent TextilesIsotropic Etching & Wet Isotropic Etching vs. Dry Isotropic EtchingLength of Activation for Plasma Treatments & Plasma Treatments and Types of Plasma CoatingLow Pressure Plasma Systems & Types of Low Pressure Plasma SystemsMaximizing Coating Adhesion & Applications of Improving Coating AdhesionNanotechnology Fabrics & Nanotechnology Fabric ProcessesNitrogen Plasma & Nitrogen Plasma vs. Oxygen PlasmaOleophobic Coating & Oleophobic Coating Plasma TreatmentOxide Etch & Buffered Oxide Etch vs. Plasma EtchOxygen Plasma Etching & How Oxygen Plasma Etching is AccomplishedPECVD Industrial Applications & PECVD EfficiencyPECVD Is an Improved Method of Chemical Vapor Deposition & Operation of PECVD SystemsPhysical Vapor Deposition & Physical Vapor Deposition ApplicationsPlasma Applications & Plasma applications in Surface ModificationPlasma Asher & How is Plasma Ashing Done?Plasma Asher Tailored to the Customer & Plasma Etchers and SelectivityPlasma Beam & Plasma Beam ApplicationsPlasma Bonding & The Techniques for Plasma BondingPlasma Etching Tailored to the Customer & Plasma Etcher ParametersPlasma Frequency & Ranges of Plasma FrequencyPlasma Gas & Plasma Gas (Partially Ionized Gas) – Degree of IonizationPlasma Generator & Types of Plasma GeneratorsPlasma Surface Modification & Plasma Surface SciencePlasma Surface Technology & Surface Technology CapabilitiesPlasma Treatment of Different Materials & Plasma Treatment of Silica PowderPlasma Treatment of Powder Applications & Experienced Powder TreatmentPlasma Treatment of Textiles & Plasma Treatment of Textiles: Medical and Technological ApplicationsPlasma Treatment Services & The Use of Corona and Plasma Treatment to Modify Contact AnglePlasma Treatment Systems & Plasma TreaterPlasma Treatments and the History of Plasma & Plasma Treat Different MaterialsPowder Treatment for the Customer & Industries that Need Powder TreatmentSteps of Dry Etching (Plasma Etching) and Wet Etching & Dyne Levels and Plasma Etching TechnologiesSurface Coating with PECVD System & Applications of PECVD SystemsSurface Treatments & Uses for Surface TreatmentsThierry Plasma Systems & What is Plasma-enhanced chemical vapor deposition (PECVD)?What Industries Plasma Etching Is Used In & Plasma Etching MechanismsWhat is a Plasma Asher? & Differences between Plasma Etch and Plasma AshWhat is Plasma Density? & Plasma Density: Cold and Hot PlasmaWhat is Plasma Treatment? & Plasma Treatment of Powders

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