Yes, based on the homogeneity test the etching rate can be determined by the weight loss.
For this purpose, slides are glued with PE tape and weighed before and after the plasma treatment. The difference can then provide information about the etching rate.
Weighing must take place on an analytical balance, as the weight loss is very low.
To learn more about etching, check out our eBook titled "Plasma Etching and Cleaning Strategy for Better Product Quality."
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