Can material weight loss be measured? (Low pressure plasma)

Yes, based on the homogeneity test the etching rate can be determined by the weight loss.

Yes , based on the  homogeneity test the etching rate can be determined by the weight loss.

For this purpose,  slides are  glued with PE tape and  weighed before  and after  the plasma  treatment.  The difference can then provide information about the etching rate.

Weighing must take place on an analytical balance, as the weight loss is very low.